01FFKM seals
O-rings, E-Seals, bonded slit-valve doors and flange seals for semiconductor chambers, valves and vacuum systems. Custom configurations based on equipment models and drawings.
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MUTU PRIME COLLECTION
Vacuum technology, selected for your process.

Temperature control. Close to the process.

Precision sealing for demanding environments.

Process exhaust. Considered from the start.

Clean air for controlled environments.

Bring your plating process into focus.

Understand the air around your process.

Keep materials moving.

MUTU PRIMESEMICONDUCTOR PARTS / SYSTEM SOLUTIONS
MUTU PRIME supplies semiconductor equipment components and integrated system solutions for wafer fabs, equipment makers and new-energy industries. From product selection to installation and maintenance, we support each stage.
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MUTU PRIME · SEMICONDUCTOR COMPONENTS. LOCAL SERVICE.
01 / PRODUCTS & SYSTEMS
01O-rings, E-Seals, bonded slit-valve doors and flange seals for semiconductor chambers, valves and vacuum systems. Custom configurations based on equipment models and drawings.
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02Gasline and Foreline heating for process-gas and exhaust piping, valves and chambers. Heating jackets, silicone designs and metal heaters with multi-channel temperature control.
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03Claw, Roots and screw dry pumps, GTP turbomolecular pumps and integrated vacuum systems for semiconductor, display and photovoltaic processes.
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04Combustion, plasma, electric-heating, wet-scrubbing and dry-adsorption systems for process exhaust. ABW, APW, AHW, AW and AD product families.
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05YSCFil II HEPA / ULPA filters and YSCFil V box filters for cleanrooms and air-purification equipment. Configurations tailored to the installation environment.
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06Integrated electroplating solutions combining membrane contactors, online CVS process analyzers and ion-exchange membranes. Monitor additives and coordinate dosing.
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07Online GC-MS, ion-chromatography and GC-PID monitoring for cleanroom airborne contamination. CP-2000GM, CP-3000i and CP-1000GP systems with remote sampling.
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08AMHS solutions combining OHT transport, stockers, inter-floor transfer and Phoenix Suite control software for wafer-fab material flow.
Explore this range ↗Explore our core portfolio. Product selection, technical specifications and delivery arrangements are confirmed for each application.
02 / ABOUT MUTU PRIME
MUTU PRIME brings semiconductor components and integrated system solutions together. We serve wafer fabs, equipment makers and new-energy industries with product selection, supply, installation and ongoing maintenance — connecting the right equipment with local technical support.
Component selection and supply for semiconductor equipment, with spare-parts planning around your application.
Integrated solutions for electroplating, process analysis, environmental monitoring and automated material handling.
Selection and design support, on-site installation and commissioning, maintenance, spare parts and technical training.
03 / LET’S TALK
Share your part number, process requirements or project brief. Contact MUTU PRIME to discuss product selection and system solutions.
01 / IDENTIFY
Include the manufacturer, model and equipment reference. A nameplate photo helps when the part number is unclear.
02 / SPECIFY
Tell us the quantity and whether you require new, used or refurbished parts.
03 / PLAN
Share the delivery country and preferred timeline. Availability and delivery dates require confirmation.
Beijing · 北京市大兴区亦庄国金 A-807