MUTU PRIME / PRODUCT DETAILS
Automated Material Handling
Connect transport, storage and control.
Product Overview
Integrated AMHS hardware and Phoenix Suite software for wafer-fab transport, storage and inter-floor transfer.
ZEUS OHT overhead transport and OHB buffers.
NTB inter-floor transfer and Stocker storage.
Sorter / EFEM for wafer handling.
Phoenix Suite includes MCS, OCS, RMS and VOS modules.
Series & Specifications
15 kg payload; stated straight-line speed 300 m/min
Stated stopping accuracy ±0.5 mm
15 kg; FOUP/FOSB; nitrogen purge option
15 kg; travel/lift 1 m/s; E84 communication
7000 × 1440 × 4200 mm reference size; custom configurations
200 / 300 mm wafers
Facility layout, carriers, transfer points, throughput and host interfaces.
Reference: MUTU PRIME Product Catalogue 2026. Specifications shown describe the listed series or configurations. Confirm the model, operating conditions and final specification with us before ordering.
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