PRODUCT PORTFOLIO
Explore our core semiconductor portfolio. Start with your process, equipment model or project requirements.
Equipment components, process systems and facility support — organised by what they do.
01 / PRODUCT LINE
O-rings and sealing components for chambers, valves and vacuum systems.
KS, KH and KR O-ring series; E-Seals; bonded slit-valve doors; flange seals; robot-arm pad seals.
Etch, CVD, PVD, ALD, diffusion, epitaxy and cleaning applications. Share your equipment model, drawing, process chemistry and temperature requirements.
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02 / PRODUCT LINE
Controlled heating for Gasline, Foreline and irregular process components.
Fiberglass jackets, molded silicone heaters, aluminium-block heaters and custom metal designs, with multi-channel temperature control.
Gas and exhaust piping, photoresist lines, valves and chambers. Provide pipe dimensions, geometry, target temperature and control-interface requirements.
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03 / PRODUCT LINE
Vacuum equipment for clean, general and demanding process conditions.
GHC claw pumps; GMR and GLR Roots pumps; GS claw/screw pumps; GHR pumps; GTP turbomolecular pumps; Megrez and Mizar integrated systems.
Semiconductor, display, photovoltaic and related vacuum processes. Specify process gas, required pumping speed, pressure, flange and cooling utilities.
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04 / PRODUCT LINE
Scrubber systems matched to semiconductor process exhaust.
ABW combustion/wet; APW plasma/wet; AHW electric-heating/wet; AW wet scrubbing; AD dry adsorption.
CVD, etch, diffusion and ion-implant applications. Product selection depends on gas composition, flow, powder load, inlet count and site utilities.
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05 / PRODUCT LINE
Air filtration for cleanrooms and air-purification equipment.
YSCFil II mini-pleat HEPA / ULPA filters and YSCFil V box filters. Custom configurations are available for the installation environment.
Electronics, biological and pharmaceutical cleanrooms. Share filter dimensions, airflow, filtration grade and installation requirements.
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06 / PRODUCT LINE
An integrated approach to bath degassing, additive monitoring and ion transport.
Online CVS / CPVS process analysis, YE-PP-M20 membrane contactors and electroplating ion-exchange membranes.
Applications include semiconductor copper plating, PCB, LED and photovoltaic processes. Discuss bath chemistry, additives, sampling points and dosing integration.
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07 / PRODUCT LINE
Continuous monitoring of airborne molecular contamination in cleanrooms.
CP-2000GM GC-MS; CP-3000i ion chromatography; CP-1000GP GC-PID, with remote sampling and monitoring software.
For fab and display cleanrooms. Define target compounds, sampling locations, reporting needs and integration with existing control systems.
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08 / PRODUCT LINE
Hardware and software for wafer-fab material transport and storage.
ZEUS OHT transport, OHB buffers, NTB inter-floor transfer, Stocker, Sorter / EFEM and Phoenix Suite control software.
Describe carrier types, layout, transfer points, throughput and host interfaces. System configuration is planned around the actual facility.
Enquire about this range ↗Specifications, configuration, availability and delivery terms are confirmed for the selected model and application.
MUTU PRIMEAbout FFKM Seals
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