MUTU PRIME / PRODUCT DETAILS
Dry & Turbomolecular Pumps
Vacuum technology matched to your process.
Product Overview
Claw, Roots and screw dry pumps, GTP turbomolecular pumps and integrated vacuum systems for semiconductor, display, photovoltaic, LED and battery processes.
Etch, CVD/PVD/ALD and ion implantation.
MOCVD/epitaxy and hydrogen-rich process applications.
Refurbishment, repair and spare-parts support are described in the catalogue.
Series & Specifications
220–5500 m³/h; demanding powder and corrosive processes
210–1050 m³/h; etch and ion-implant chamber processes
110–3500 m³/h; clean processes
1800–5500 m³/h
600 m³/h
300 L/s nitrogen pumping speed; ceramic-ball bearing
1400–3200 L/s; magnetic bearings
Megrez plasma/pump integration; Mizar stacked pump system
Reference: MUTU PRIME Product Catalogue 2026. Specifications shown describe the listed series or configurations. Confirm the model, operating conditions and final specification with us before ordering.
Ask About This Product
Have a question about Vacuum Pumps? Leave a message and your email for a private reply.
