MUTU PRIME / PRODUCT DETAILS
FFKM Seals
Sealing for demanding semiconductor processes.
Product Overview
KS ultra-clean, KH heat-resistant and KR chemical-resistant O-rings; E-Seals; bonded slit-valve doors; NW/KF/ISO and metric flange seals; robot-arm pad seals and epitaxy seals.
Etch, CVD, PVD, ALD, diffusion, epitaxy and CMP equipment.
Chambers, valves, piping and vacuum-system sealing.
Equipment-specific and drawing-based configurations.
Series & Specifications
Series and compound must match chemistry, temperature and plasma exposure.
−60°C to +330°C across the product line; confirm the selected compound’s rating.
Provide dimensions, drawing, equipment model and cleaning/packaging requirements.
Reference: MUTU PRIME Product Catalogue 2026. Specifications shown describe the listed series or configurations. Confirm the model, operating conditions and final specification with us before ordering.
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