MUTU PRIME / PRODUCT DETAILS
Process Exhaust Treatment
Abatement for semiconductor process exhaust.
Product Overview
Combustion, plasma, electric-heating, wet-scrubbing and dry-adsorption approaches for exhaust from CVD, etch, diffusion and related processes.
Selection based on gas composition, flow and powder load.
Catalogue options include single- and dual-chamber systems.
Utilities, inlet count and process safety requirements require application review.
Series & Specifications
Combustion + wet scrubbing; 1000 / 1500 lpm
Plasma + wet scrubbing; 1000 / 1500 lpm
Electric heating + wet scrubbing; 800 / 1000 lpm
Wet scrubbing; 1000 lpm
Dry adsorption; 200 / 400 lpm
Leak checks, flame detection and gas/smoke monitoring; configuration varies by system.
Reference: MUTU PRIME Product Catalogue 2026. Specifications shown describe the listed series or configurations. Confirm the model, operating conditions and final specification with us before ordering.
Ask About This Product
Have a question about Exhaust Treatment? Leave a message and your email for a private reply.
